Use of id semiconductor materials as chemical sensing materials, produced and operated close to room temperature

ABSTRACT

The application relates to a chemical sensor device comprising a substrate ( 1 ), a sensor medium ( 3 ) formed on the substrate, the sensor medium comprising one-dimensional nanoparticles, wherein the one-dimensional nanoparticles essentially consist of a semiconducting A x B y  compound, e.g. V 2 O 5  and detection means ( 2 ) for detecting a change of a physical property of the sensor medium e.g. conductivity. The porosity of the sensor medium supports a fast access of the analyte to the sensing material and therefore a fast response of the sensor. The selectivity and sensitivity of the sensor can be tailored by doping the one-dimensional nanoscale material with different dopants or by varying the dopant concentration. Sensitivity of the sensor device to an analyte, preferably an amine, can be increased by increasing relative humidity of the sample to at least 5%.

The invention relates to a chemical sensor device, a method forobtaining such chemical sensor device and a method for detecting analyteby using said chemical sensor device.

In recent years much effort has been made to develop devices, whichmimic the sense of smell or taste. Such devices, which are usuallycalled electronic noses and electronic tongues, respectively, would bewell suited for a broad variety of applications, such as entertainmentrobots, identification systems, quality control systems, environmentalmonitoring, and medical diagnostics. However, up to now only a limitednumber of electronic nose devices have been marketed. Although thesedevices are capable of identifying or classifying some “odour” samples,further improvements are necessary to fulfil the needs for many advancedapplications mentioned above. These applications often require highersensitivity, higher discrimination capability, faster response, betterstability, and lower power consumption. Since such features stronglydepend on the characteristics of the chemical sensors used in thedevice, there is a strong demand for improved sensors meeting therequirements for advanced e-nose and e-tongue applications. An overviewof sensor principles currently under development is given in J. W.Gardner and P. N. Bartlett, Electronic noses—Principles andapplications, 1999, pages 67-116 Oxford University Press, Oxford.

There are several gas sensors available on the markets among which aremetal oxide sensors, often referred to as Tagushi sensors. They arecomposed of metal oxide(s) having a porous form, generally doped with ametal. They are operated at elevated temperatures of 100 to 600° C. inorder to allow combustion of the analyte at the metal oxide surface,inducing a change of oxygen concentration and therefore a change inconductance. Metal oxide sensors are generally employed as single deviceto detect toxic or flammable gases. They can also be employed as arraysfor electronic noses, but their use for odour recognition was up-to-nowlimited by the lack of selectivity.

J. Kong, N. R. Franklin, C. Zhou, M. G. Chapline, S. Peng, K. Cho and K.Dai, Science, 2000, 287, 622-625 describe chemical sensors based onindividual single-walled carbon nanotubes (SWNTs). Upon exposure togaseous molecules such as NO2 or NH3, the electrical resistance of asemiconducting SWNT is found to change by up to three orders ofmagnitude within several seconds of exposure to analyte molecules atroom temperature. The chemical sensors are obtained by controlledchemical vapour deposition growth of individual SWNTs from patternedcatalyst islands on SiO₂/Si substrates. Sensor reversibility is achievedby slow recovery under ambient conditions or by heating to hightemperatures. After e.g. the NO₂-flow is replaced by pure Ar, theconductance of the SWNT sample slowly recovers with a typical recoverytime of about 12 hours at room temperature.

Z. W. Pan, Z. R. Dai and Z. L. Wang, Science, 2001, 291, 1947-1949,describe the synthesis of ultralong beltlike nanostructures, so-callednanobelts, of semiconducting oxides of zinc, tin, indium, cadmium, andgallium by evaporating the desired commercial metal oxide at hightemperatures. The as-synthesized oxide nanobelts are pure, structurallyuniform, and single crystalline, and most of them are free from defectsand dislocations. They have rectangle cross section with typical widthof 30 to 300 nanometers, width-to-thickness ratios of 5 to 10, andlengths of up to a few millimetres. A possible use of doped nanobelts asnanosize sensor is suggested.

V. Bondarenka, S. Grebinskij, S. Mickevicius, H. Tsardauskas, Z.Martunas, V. Volkov and. G. Zakharova, Phys. Stat. Sol., 1998, A 169,289-294, have investigated the influence of humidity on the electricalproperties of poly-vanadium acid xerogels and xerogels based onpoly-vanadium acid where vanadium is partly substituted by molybdenum ortitanium. The conductance of thin-film samples increases with anincrease in humidity as an exponential function and therefore thosefilms are suitable for the fabrication of humidity sensors. Thin filmsof the vanadium-metal-oxygen materials were produced by the sol-geltechnology. The vanadium pentoxided powder and the other components weredissolved in hydrogen peroxide at 273K. Then the solution was heated inan open beaker at 353K for one/two hours. The obtained gels weredeposited by a screen-printing method on substrates and baked at 333K inair. All compounds such obtained have a layered structure withinterlayer distances of 11,1 to 11,5 Å. The amount of water contained inthe compounds depends on the relative humidity RH and increases with anincrease in RH.

S. Capone, R. Rella, P. Siciliano and L. Vasanelli, Thin Solid Films,1999, 350, 264-268, investigated the physical and gas sensing propertiesof bulk material V₂O₅ and WO₃ thin films. Gas-sensitive films ofvanadium oxide and tungsten oxide were prepared by means of sputteringtechnique in a thickness of about 200 nm. Samples for gas testing wereplaced onto a heated sample holder and exposed to different gasconcentrations. For both materials at high temperatures a strongexponential dependence of the electrical conductivity on the temperaturewas observed. Upon exposure to NO gas an increase of the electricalresistance of the films was observed. WO₃-based sensors exhibited highersensitivity values than V₂O₅ ones. In addition, tungsten oxide thinfilms were also able to detect very low concentrations of NO in thesub-ppm range. V₂O₅ could be used for detection of high concentration ofNO, up to a range of 50-500 ppm.

Z. A. Ansari, R. N. Kareka and R. C. Aiyer, Thin Solid Films, 1997, 305,330-335 describe a humidity sensor using planar optical waveguides withcladdings of various oxide materials, among others bulk-V₂O₅. The planarwaveguides were fabricated on a soda-lime glass substrate using anion-exchange process. Films of porous semiconducting oxides were screenprinted on the waveguide surface. The relative humidity (RH) was variedfrom 3 to 98%. At a cladding length of 3 mm and a cladding thickness of25 μm V₂O₅ exhibited a response time of 5 s and a recovery time of 30min. A hysteresis of 8% is observed for V₂O₅ cladding.

R. Rella, P. Siciliano, A. Cricenti, R. Generosi, L. Vanzetti, M.Anderle and C. Coluzza, Thin Solid Films, 1999, 349, 254-259, studiedthe physical properties and gas-surface interaction of bulk vanadiumoxide thin films. Thin films of vanadium oxide were prepared by means ofr.f. reactive sputtering. For evaluation of sensing properties the filmswere electrically tested in presence of different gases. Films grownwith 15% oxygen in an Ar—O₃-mixture exhibited best sensing properties,giving a maximum response at a working temperature ranging between 280and 300° C.

In most cases vanadium pentoxide is only a secondary component in thesensitive coating employed in combination with a more sensitivematerial, e.g., WO₃. X. Wang, N. Miura and N. Yamazone, Sensors andActuators, 2000, B66, 74-76, report on WO₃-based sensing materials forNH₃ and NO detection. Gas sensing materials loaded with 1 wt.-% metaloxides were prepared. The sensing properties of these materials towardsNH₃ and NO were better than of sensing films of pure WO₃.

The use of vanadium pentoxide films as temperature sensor is describedby Z. S. El Mandouh and M. S. Selim, Thin Solid Films, 2000, 371,259-263. The vanadium pentoxide films were prepared by an inorganicsol-gel method. The temperature coefficient of resistance, β_(T), is 2%K⁻¹, which indicates, that V₂O₅ can be used as a thermoresistor.

WO98/26871 discloses nanotubes made from transitions metal oxides,preferably from a vanadium oxide of variable valence. The nanotubes showoxidation-reduction activities and are particularly suited as an activematerial for catalytic reactions. In the experimental part synthesis ofvanadium oxide nanotubes and the structure of the nanotubes obtained isdescribed.

WO01/44796 discloses a nanotube device comprising at least one nanotube,preferably a carbon nanotube, which is electrically connected with itsends to first and second conducting elements. The nanotube device may beused as a chemical or biological sensor. To tune the sensitivity of thedevice to a variety of molecular species the nanotubes may be modifiedby coating, or decorating with one or more sensing agents, so as toimpart sensitivity to a particular species in its environment. Thenanotubes may also be formed from other materials than carbon, e.g.silicon. Detection of various analytes is demonstrated in theexperiments. Experiments were done on NO₂ and NH₃ gas, thioles, H₂, COand avidin (a protein). Modification of the sensitivity by depositingmetal particles, e.g. gold, platinum of nickel, metal oxides, e.g. TiO₂,or biological species on the sensing agent is also described.

Several types of sensors can be employed at room temperature and showgood selectivity to organics. The most commonly encountered areconducting polymer chemiresistors polymer based SAW (Surface AcousticWave) and BAW (Bulk Acoustic Wave) devices. However, some of thesesensors suffer from low sensitivity like for example conducting polymerchemiresistors to gases. Devices based on mechanical transducers likecantilever and BAW devices are harder to incorporate into integratedcircuits than the ones based on electrical transducers. For opticaldetection based sensors, the complexity of the transducer may be alimiting factor, especially when miniaturisation is considered.Concerning electrochemical cells, they are of limited use in the gassensor domain but are gaining importance for electronic tongues.

A general problem in the use of sensors is humidity. Found in a largemajority of samples it decreases the detection capabilities. The firstreason is related to the fact that water will influence the analytepartitioning in the sensor medium or weaken the interactions of theanalyte with the sensor medium. An example is the detection of an aromaof wine. One has to be capable of detecting traces of an aromaticcompound among a matrix containing large amounts of water and alcohol. Asecond problem is that a change in humidity can be seen as a falsedetection. For example in the case of CO detection, a 20% change inrelative humidity should not be interpreted as a 50 ppm CO.

A way to minimize the humidity problem is to dry the analyte. One candehydrate the sample itself before analysis, for example dehydratingcheese before sensory analysis. The drawback is that the smell maydenature during the process because volatiles are removed or decomposed.The headspace of the sample can also be dried before reaching thedetector. This can for example be performed using a nafion filter. Waterwill be filtered off but some components of the analyte, like alcohols,will also be removed, partially or completely. Water can also beeliminated by separating the different chemicals of a sample usingtechniques like gas chromatography or similar techniques.

Only a limited number of reports exist where humidity is of advantage,meaning the sensors show an increase of sensitivity with increasinghumidity. Kappler, J.; Tomescu, A.; Barsan, N.; Weimar, U.; Thin SolidFilms 2001, 391, 186-191, report on an increase of sensitivity of SnO₂gas sensors operated at elevated temperature toward CO with increasinghumidity. The sensor's response (R_(air)/R_(co)) increased from 5 to 30by increasing the humidity from 0 to 50% relative humidity. Sadaoka, Y.;Sakai, Y.; Murata, Y. U.; Sensors and Actuators 1993, B 13-14, 420-423report a similar behavior of an optical sensor based oncalcein-poly(acrylonitrile) in the case of ammonia detection. Thesensitivity increased when I/I₀ (optical intensity ratio) decreased from0.95 to 0.83 under dry air and 50% relative humidity, respectively.Another illustration is based on host molecules (tecton, DM 189)deposited on a mass-sensitive device (Boeker, P.; Horner, G.; Rosler, S.Sensors and Actuators 2000, B 70, 37-42). The response to 100 ppmammonia (in Hertz) is double at 20.000 ppm water (saturated, humidity)compared to the response in dry air.

Amines are found in many foodstuffs, for example in wine, fish, cheeseor meat. Amines can be for example indicators of fish freshness. Aminescan also give some information on the health status of a person. Thereis therefore a need for amine sensors in the food industry and formedical applications. These sensors should be highly sensitive to thetarget preferably as well as show no significant decrease in sensitivitywhen humidity is present. An electronic nose comprising such sensors istherefore of great interest.

Some amine gas sensors are commercially available. For exampleelectrochemical cells are offered on the market that are specific to agiven amine, and that for a wide range of amines. The detection limit isaround 2.5 to 5 ppm, depending on the amine. The main problem appears tobe the size, which is in the centimeter scale. Metal oxide sensors canalso detect ammonia, with a detection limit of about 25 ppm, but theysuffer from their high power consumption and a low selectivity toamines.

It is an object of the invention to provide a chemical sensor devicewith a high selectivity towards analytes, a high sensitivity and a highstability in performance which can be operated at a temperature close toroom temperature and has low power consumption.

To solve this object, the present invention provides a chemical sensordevice, comprising a substrate, a sensor medium formed on the substrate,the sensor medium comprising one-dimensional nanoparticles, wherein theone-dimensional nanoparticles essentially consist of a semiconductingA_(x)B_(y) compound, wherein the semiconducting A_(x)B_(y) compound isselected from the group, consisting of II-VI-semiconductors,III-V-semiconductors, semiconducting metal oxides (B═O), semiconductingmetal sulfides (B═S), semiconducting metal phosphides (B═P), metalnitrides (B═N), semiconducting metal selenides (B═Se) and semiconductingmetal tellurides (B═Te); and detection means for detecting a change of aphysical and/or chemical property of the sensor medium.

The semiconducting metal compounds have different selectivities towardsa target analyte. The material of the one-dimensional nanoparticles usedfor assembling the sensor device are therefore selected depending on theanalyte to be detected. The semiconducting A_(x)B_(y) compound may be abinary compound wherein A and B are a single element, respectively.Examples are SnO₂ and MgO. Further also ternary or quaternary compoundsmay be used, e.g. GaAs/P. Preferably is x>0 and y>0.

Preferably A is at least one element selected from the group consistingof V, Fe, In, Sb, Pb, Mn, Cd, Mo, W, Cr, Ag, Ru and Re. Preferably B isat least one element selected from the group consisting of O, S and Se.

The metal (compound A) in a semiconducting A_(x)B_(y) compound may bepresent in a single oxidation state. Preferably at least one element (Aor B) is present in different oxidation states in a shinglesemiconducting A_(x)B_(y) compound. Most preferred Element A is presentin different oxidation states. The ratio between the two oxidationstates preferably ranges between 0.001 and 0.1. When using e.g. V₂O₅ asa material of the one-dimensional nanoparticles vanadium may be presentin the V⁴⁺ as well as in the V⁵⁺ state. In the case of V₂O₅, the mixedvalence is due to defects in the structure.

Therefore, the mixed valence is not obvious from the formula. Anotherexample for a mixed valence compound is Fe₃O₄ where the stoichiometricindexes indicate that there are. Fe^(II) and Fe^(III) in the materialand the ratio of Fe ions in the oxidation states II/III is equal to 0.5.Further examples for elements forming e.g. oxides and sulfides where theelement can be of different oxidation state are cobalt, chromium, lead,titanium, rhenium and molybdenum. Further illustrations of elementsgiving in the case of oxides different oxidation states are aluminium,gallium, germanium or iridium. Within one given material, two differentoxidation states can be encountered (mixed valence). Sn is as Sn^(II) inSnO, as Sn^(IV) in SnO₂ and as Sn^(II) and S^(IV) Sn₃O₄. Similarly, Sbis found as Sb^(III) and Sb^(IV) in oxide, as well as (III and V) inSb₂O₅.xH₂O. Chromium can form oxides with the oxidation states II, III,IV and VI, as well as (II and III) in Cr₃O₄. Similar behaviour is knownfor manganese (II, III, IV, VII, and (II and III) in Mn₃O₄) as well assilver (I and III in Ag₂O₃).

The mixed valence can also be introduced by defects, e.g. by a dopant oran impurity. By providing an element in different oxidation states thecharge carrier concentration can be controlled and therefore theelectrical conductivity of the semiconducting A_(x)B_(y) compound atroom temperature may be enhanced. By creating possible reaction sites,for example by introducing defects, the sensitivity of the sensor may beenhanced.

The one-dimensional nanoparticles used as the sensitive medium in thesensor device according to the invention have a much larger extension ina longitudinal direction than in directions perpendicular thereto.Usually the nanoparticles have dimensions in the micrometer scale in alongitudinal direction and in the nanometer scale in both directionsperpendicular thereto. Preferably the one-dimensional nanoparticles havea length of less than 100 μm, especially preferred less than 15 μm, mostpreferred between 100 and 15 μm, and a cross section of less than100.000 nm², preferably less than 5000 nm², especially preferred lessthan 50 nm². The length of the one-dimensional nanoparticles canconveniently be controlled by the reaction time during the synthesis ofthe one-dimensional nanoparticles. The one-dimensional nanoparticleshave the shape of a fibre and therefore do not easily self-organize toform a close-packed arrangement as for example nanoparticles which havea spherical shape. Therefore voids within the sensor medium areincreased allowing a better access of the analyte to the one-dimensionalsensing material. The sensor medium of the sensor device according tothe invention provides a large surface area accessible to the analytewhich enables a high sensitivity of the sensor medium and a fastresponse of the sensor device.

The one-dimensional nanoparticles are present in the sensor medium asindividual particles. It is sufficient to stabilize the sensor mediumjust by physical interactions and to deposit the one-dimensionalnanoparticles on a substrate surface. To increase mechanical stabilityof the sensor medium the one-dimensional nanoparticles may beinterlinked by e.g. bifunctional ligands or may be embedded in a matrix.

The one-dimensional nanoparticles used in the sensor device according tothe invention are made from a semiconducting material essentiallyconsisting of a semiconducting A_(x)B_(y) compound. Depending on thenature of the components A and B of the semiconducting A_(x)B_(y)compound the one-dimensional nanoparticles have different selectivitytowards a given analyte compared to the carbon-SWNT based sensorsdescribed by J. Kong et al. loc. cit. Methods for obtainingone-dimensional nanoparticles, as used in the sensor device according tothe invention, are well established. The one-dimensional nanoparticlescan easily be modified in their composition, e.g. by addition of adopant, and therefore the sensor device can be tailored to a targetanalyte.

The chemical sensor device according to the invention can be operatedclose to room temperature and therefore has low power consumptionbecause generally no heating of the sensor medium is necessary. Thisalso enables an easy operation of the sensors according to theinvention. Usually the sensor is operated at temperatures below 100° C.,preferably below 50° C. especially preferred at room temperature. Thesensors can be produced at low costs and also can be miniaturized toform part of integrated circuits.

The one-dimensional nanoparticles may be hollow or filled and may e.g.have the form of a nanotube or a nanowire. Filled one-dimensionalnanoparticles are preferred. Further the one-dimensional nanoparticlesmay have various shapes of cross sections, e.g. may have a round(circular) or rectangular cross section. The one-dimensionalnanoparticles may then have the form of a nanowire or a nanobelt.Nanobelts are especially preferred as sensing material. The sensormedium may also comprise bundles of one-dimensional nanoparticles.

The synthesis of one-dimensional nanoparticles formed ofII-VI-semiconductors or III-V-semiconductors is e.g. described by X.Duan and C. M. Lieber, Adv. Mat, 2000, 12, 298-301. Binary Group III-Vmaterials that may be used for the sensor according to the invention aree.g. GaAs, GaP, InAs and InP. Ternary III-V materials are GaAs/P orInAs/P, examples for binary II-VI compounds are ZnS, ZnSe, CdS, andCdSe. One-dimensional nanoparticles have been prepared from theabove-mentioned semiconducting materials in bulk quantities with highpurity. Nanowires for examples can be prepared using the laser assistedcatalytic growth (LCG) method.

One-dimensional nanoparticles of semiconducting metal oxides can beprepared by a method described by Z. W. Pan et al. loc. cit.Semiconducting metal oxides that can be used as a source for thepreparation of one-dimensional nanoparticles used in the sensor deviceaccording to the invention are e.g. Ga₂O₃, SnO₂, In₂O₃, PbO₂, MgO,Fe₂O₃, W₁₈O₄₉, and GeO₂. One-dimensional nanoparticles consisting ofsemiconducting metal sulfides may be prepared from MoS₂, NbS₃, TaS₂,TiS₂, WS₂, W_(0.7)Mo_(0.2)C_(0.1)S₂. A suitable method to prepare MoS₂and WS₂ as well as BN nanotubes is e.g. described by M. M. Nath, A.Govindaraj and C. N. R. Rao, Adv. Mat., 2001, 13, 283-286.

Patzke, G. R.;, Krumeich, F.; Nesper, R. Angew. Chem. Internat. Edit.2002, 41, 2446-2461 reported on the formation of nanotubes, and nanorodsof oxides (e.g. Fe₂O₃, Fe₃O₄, In₂O₃, Sb₂O₃, SnO₂, TiO₂ and SiO₂). Thesynthesis of Si₃N₄-nanoparticles has been described by Han, W.; Fan,.S.; Li, Q.; Hu, Y. Science 1997, 277, 1287-1289; Remskar, M.; Mrzel, A.;Skraba, Z.; Jesih, A.; Ceh, M.; Demsar, J.; Stadelmann, P.; Levy, F.;Mihailovic, D. Science 2001, 292, 479-481 described the synthesis ofone-dimensional nanoparticles made from GaSe.

One-dimensional nanoparticles can be prepared with a wide range ofcompounds using a porous template, e.g. a porous polycarbonate membrane(Kovtyukhova, N. I.; Mallouk, T. E. Chem. Eur. J. 2002, 8, 4355-4363;Mbindyo, J. K. N.; Mallouk, T. E.; Mattzela, J. B.; Kratochvilova, I.;Ravazi, B.; Jackson, T. N.; Mayer, T. S. J. Am. Chem. Soc. 2002, 124,4020-4026) or a one-dimensional template. Examples of one-dimensionaltemplates are carbon nanotubes or organic fibres. The template can beremoved via the appropriate technique, for example thermal decompositionor etching, leaving the required one-dimensional nanoparticles. Detailstowards the growth of one-dimensional nanoparticles are given e.g. inCaruso, R. A.; Schattka, J. H.; Greiner, A. Adv. Mat. 2001, 13,1577-1579.

The materials mentioned above can be used in pure form or in combinationwith each other. For example it is possible to use one-dimensionalnanoparticles made of pure V₂O₅. The physical characteristics of theone-dimensional V₂O₅ may be modified by adding a further material, e.g.WO₃, to the one-dimensional V₂O₅-material. Further differentone-dimensional nanoparticles made of different semiconducting materialsmay be used within a single sensor medium of the chemical sensoraccording to the invention. The sensor medium then contains e.g. a firstone-dimensional nanoparticle made of a first semiconducting A_(x)B_(y)compound and a second one-dimensional nanoparticle made of a secondsemiconducting A_(x)B_(y) compound.

Preferably the semiconducting one-dimensional nanoparticles are made ofa vanadium oxide material. Vanadium pentoxide one-dimensionalnanoparticles are easily obtained by wet-chemistry, in large amounts andas pure material. They can be obtained both as nanotubes and asnanofibres or nanobelts. Vanadium pentoxide nanofibres show a suitableconductivity and can be used as coatings for chemiresistor devices.

Vanadium pentoxide nanotubes can be synthesised by templating with anamine. Such a method is described e.g. by H. J. Muhr, F. Krumeich, U. P.Chonholzer, F. Bieri, M. Niederberger, L. J. Gaukler and R. Nesper, Adv.Mat., 2000, 12, 231-234. The amine contributes to the formation oflayers, which then roll to form multiwalled tubes. The amine can laterbe readily exchanged with neutral amine or cations by proton exchange.If no template is employed in the synthesis, the vanadium pentoxide canform belts with a rectangular cross section. Vanadium pentoxidenanobelts are well-organized solids of well defined dimension. They formribbons of about 1-5 nm thickness, 10 nm width and more than 500 nm inlength. They are n-type semiconductors produced by polymerisation ofammonium(meta) vanadate on an acidic ion exchange resin. The synthesisof vanadium pentoxide nanobelts is described e.g. by O. Pelletier, P.Davidson. C. Bourgaux, C. Coulon, S. Regnault and J. Livage, Langmuir,2000, 16, 5295-5303.

The one-dimensional nanoparticles can be employed as synthesized in anundoped form. To modify and to tune the selectivity and sensitivity ofthe sensors according to the invention towards a target analyte theone-dimensional nanoparticles may be doped with a dopant. Sensors withappropriate dopants are highly sensitive and allow detection of analytesat concentration levels below 1 ppm.

As a dopant ions may be used, which are incorporated in the structure orimmobilized at the surface of the one-dimensional nanoparticle. This ispossible by exchanging protons at the surface of the one-dimensionalnanoparticle. In case of vanadium oxide most of the vanadium atoms inthe one-dimensional vanadium oxide material contained in the sensormedium of the sensor according to the invention have a valence of (V),but up to 10% of the vanadium atoms can be in the valence (IV) state. Tocompensate for the charge defect the surface of the fibres isprotonated. These protons can be readily exchanged, introducing a dopantin the film. Only part of these protons is exchanged by doping. T.Coradin, D. Israel, J. C. Badot and N. Baffier, Mat. Res. Bull., 2000,35, 1907-1913, describe that up to 15% of the protons can be exchangedfor large cations. When using vanadium oxide comprising only vanadium inthe +V oxidation state hydroxy groups may be formed on the surface ofthe one-dimensional nanoparticle by partially hydrolysing the vanadiumoxide in water. Such hydroxy groups are acidic and the protons may beexchanged by cations, e.g. Ag⁺. Higher doping levels can be achieved byoxidation of a metal in solution. Silver doped vanadium pentoxide hasbeen described by F. Coustier, S. Passerini and W. H. Smyrl, Solid StateIonics, 1997, 100, 247-258. The insertion of large ions can be catalysedby a small cation. The small cation aims at partially disrupting thelayered structure of the material enabling exchange by a larger cation.

The one-dimensional nanoparticles can also be doped by intercalation ofneutral molecules between layers of the one-dimensional nanoparticles.This implies swelling of the structure inducing a weakening of theinteraction forces between different layers of the one-dimensionalnanoparticle. Such an intercalation of neutral molecules between layersof vanadium pentoxide xerogels is e.g. described by T. Coradin et al,loc. cit. and H. P. Oliveira, C. F. O. Graeff and J. M. Rosolen, Mat.Res. Bull, 1999, 34, 1891-1903. It is also possible to immobilizemolecules or particles on the surface of the one-dimensionalnanoparticle.

Possible dopants that may be used to dope the sensor medium are ions,like Au(III) from gold chloride or gold acetate, Au(I) or Ag(I) from theacetate or nitrate salt may also be employed. Also possible is to dipthe one-dimensional nanoparticles into a solution containing the metalwhich is used as a dopant in solid form. The metal is then oxidized andincorporated into the one-dimensional nanoparticles. Such anincorporation of metal ions into vanadium pentoxide xerogels has beendescribed e.g. by F. Coustier, G. Jarero, P. Passerini and W. H. Smyrl,Journal of Power Sources, 1999, 83, 9-14 who used a copper-doped V₂O₅xerogel as an ingredient of a cathode material in a coin cell assembly.

Further the one-dimensional nanoparticles can be doped with organicmolecules. A broad variety of organic molecules may be used as dopantThe organic molecules may be hydrocarbons which may comprise one or moreheteroatoms which may form polar groups. Suitable heteroatoms are e.g.oxygen, nitrogen, phosphor or sulfur. Suitable organic compounds aree.g. aromatic or aliphatic thiols, carboxylic acids, amines, phosphines,phosphine oxides, pyridine and pyridine derivatives, thiophene andthiophene derivatives, pyrrole and pyrrole derivatives. The organicmolecules are adsorbed on the surface of the one-dimensionalnanoparticles or intercalated between layers the one-dimensionalnanoparticles thereby modifying the physical and chemicalcharacteristics of the one-dimensional nanoparticles. For example T.Kuwahara, H. Tagaya and J. Kadokawa, Inorganic Chemistry Communications,2001, 4, 63-65, report on the intercalation of organic dyes in layeredhost lattice V₂O₅. The intercalation of pyridine derivatives intoV₂O₅-xerogels is described by Y. Shan, R. H. Huang and S. D. Huang,Angewandte Chemie International Edition, 1999, 38, 1751-1754.Furthermore the one-dimensional nanoparticles can be doped withconducting polymers. Such inorganic-organic hybrid microstructures areknown e.g. from J. H. Harreld, B. Dunn and L. F. Nazar, InternationalJournal of Inorganic Materials, 1999, 1, 135-146, who prepared vanadiumoxide-polypyrrole hybrid aerogels. Furthermore also large organiccations can be incorporated into the structure of the one-dimensionalnanoparticles. Such a material has been described. e.g. by M. Inagaki,T. Nakamura and A. Shimizu, J. Mater. Res., 1998, 13, 896-900, whoprepared intercalation compounds from ammonium cations and vanadiumoxide xerogels. As part of this invention incorporation of organicmolecules increases the sensitivity to organic vapours. It is assumedthat the organic molecules enhance the interaction with the vapour andthe vapour uptake.

Also ion complexes can be used as a dopant for doping theone-dimensional nanoparticles. An ion complex that can be used as adopant according to the invention are e.g. auriothioglucose or metalcomplexes with large organic molecules, like phthaloctyanins orporphyrines, H. P. Oliveria et al. loc. cit. describe the intercalationof porphyrin-copper complexes into V₂O₅-xerogels.

According to a preferred embodiment of the invention the sensor mediumof the chemical sensor device additionally comprises a secondnanoparticle material which preferably has an approximately sphericalshape. The incorporation of second nanoparticles different from theone-dimensional nanoparticles into the sensor medium allows themodification of the sensor selectivity and sensor sensitivity. Metalnanoparticles can be formed by evaporation of the metal on theone-dimensional nanoparticles pre-immobilized on the substrate. Furthermetal nanoparticles stabilized with an organic shell can be preparede.g. by wet chemical methods. A method for preparing such nanoparticlesis e.g. described by M. Brust, J. Fink, D. Bethell, D. J. Schiffrin andC. Kiely, J. Chem. Soc., Chem. Commun., 1995, 1655-1656. This techniqueis applicable to a wide range of metal nanoparticles. Examples are Fe,Au, Ag, Pt, Pd, as well as some binary nanoparticles, like Fe/Pt. Suchstabilized nanoparticles are soluble in common organic solvents. Thesenanoparticles can be immobilized on the one-dimensional nanoparticles bysimply dipping the substrate pre-coated with the one-dimensionalnanoparticles in the corresponding solution of the second nanoparticle.A chemical coupling between the one-dimensional nanoparticles and thesecond nanoparticles is possible through a bi- or polyfunctional organiclinker compound. Finally, certain metal ion complexes, once in solution,produce metal particles that can be immobilised by the above-describeddipping procedure. Such metal complexes are e.g. silver acetate orAuS(CH₃)₂Cl.

Vanadium pentoxide nanobelt-based chemical sensors are also sensitive tohydrogen gas. Thee sensitivity is enhanced by doping vanadium pentoxidenanobelts with a metal e.g. gold. It can be doped with nanoparticlesstabilized with an organic shell, or by evaporation of a thin metallayer or with a metal salt that is converted to nanoparticles during thedoping process.

According to a preferred embodiment the second nanoparticles consists ofa semiconducting material. As a semiconducting material may be used e.g.II-VI and III-V semiconductors, Cd₃P₂ or PbS₂.

The sensitivity of the sensor towards a given analyte is influenced bythe dopant. For detection of CO suitable dopants for vanadium pentoxidenanobelts are for example:

-   -   Platinum metal from evaporation a thin layer;    -   Iron(III)phthalocyanine;    -   Gold, metal obtained from evaporation of a thin layer or from        doping with AuS(CH₃)₂Cl at a high doping level.

The chemical sensor device according to the invention may use variousphysical and/or chemical properties to detect an analyte. In a firstgroup, a change of electrical characteristics is detected. For example,a change in conductivity or capacity of the sensor medium may bemeasured. Therefore, the chemical sensor device may act as achemiresistor or a chemicapacitor. The sensor medium can also beutilized in a configuration forming a chemidiode or a multiterminaldevice, such as a chemitransistor (e.g. Chem-FET). Examples of chemicalsensitive transistors comprising semiconducting oligomers based onpolythiophene have recently been described in the literature (B. Crone,A. Dodabalapur, A. Gelperin, L. Torsi, H. E. Katz, A. J. Lovinger, Z.Bao, Appl. Phys. Lett. 2001, 78, 2229-2231). The chemical sensor devicemay also be used as a mass sensitive sensor. The sensitive filmcomprising the one-dimensional nanoparticles is then used as a coatingon a piezo-electric material to form a chemically sensitive surfaceacoustic wave (SAW), device or a quartz crystal microbalance (QCM) or acantilever or any combination of such sensor types.

According to another embodiment, the chemical sensor device is used asan optical sensor. The sensor signal may then be measured as a change inreflectance, fluorescence, absorption, or scattering. In this case, thebinding of analyte molecules to the sensor material leads to a change ofoptical properties (UV/vis and/or IR). For example, the luminescenceproperties may change when the analyte molecules are adsorbed to thesemiconducting one-dimensional nanoparticles. This change is due to achange of the electronic states of the one-dimensional nanoparticlesand/or of the close environment of the one-dimensional nanoparticles.Furthermore the one-dimensional nanoparticles can be combined withappropriate chemicals, e.g. dyes, to induce a change of opticalcharacteristics upon interaction with an analyte.

It is also possible to utilize the sensor medium as chemically sensitivecoating for fiber optics (e.g. optodes, interferometer devices). Thechemical sensor device may also use changes in heat or temperature andtherefore be used as a thermistor, or other thermoelectric device.

Preferably the chemical sensor device is formed as a chemiresistor,wherein the sensor medium is addressed by a pair of contactingelectrodes.

The sensor medium may be deposited as a film onto interdigitatedelectrodes, e.g. made of Au, which were deposited onto an inertsubstrate, e.g. by lithographic techniques, or both electrodes may bedeposited on top of the film. Also other configurations are possible.One electrode may be positioned below the sensor film and the other maybe deposited on top of the sensor film. By the sorption of the analyteto the one-dimensional nanoparticles the electronic properties of thesensor are influenced resulting in a change of conductivity of thesensor film.

A heater may be provided at the sensor medium to control temperature andto heat, if required, the sensor medium for regeneration. The purpose ofthe heater may also be to modulate the temperature within a desiredrange. Performing a wavelet analysis of the signal may allow for analyteidentification and quantification. A temperature sensor is also ofadvantage to monitor the real temperature.

The inert substrate can be made for example of Si/SiO₂ when the chemicalsensor is integrated in an IC device. Further preferred substrates aremade of glass and/or ceramics.

Several chemical sensors, which preferably have different compositionsof the sensor medium and/or which are operated at different temperaturesmay be arranged to form a sensor array. For the selectivity andsensitivity of the sensor towards different analytes not only the natureof the dopant but also the doping level is important. Therefore an arrayof sensors with a gradient of concentration of dopant can be used as anarray for electronic nose purposes.

The small size of the one-dimensional nanoparticles allows readilyminiaturisation of the devices. The chemical sensor according to theinvention therefore may be miniaturized, e.g. to be used in a sensorarray in an IC device.

The one-dimensional nanoparticles used in the chemical sensor deviceaccording to the invention have a quite high electrical conductivity.This is especially the case when vanadium pentoxide is used as theone-dimensional nanoparticles. Vanadium oxide comprises vanadium in thevalence +IV and +V state and therefore already provides good electricalconductivity at room temperature.

The sensing action of the sensor device according to the invention canbe based on different types of interactions between the analyte and thesensing material. The analyte may be adsorbed on the surface of theone-dimensional particles or may be intercalated into the structure ofthe sensing material. Depending on the length of the one-dimensionalnanoparticles also sensor devices comprising a single one-dimensionalnanoparticle may be prepared. In this case preferably a singleone-dimensional nanoparticle is bridging the gap between the twoelectrodes. A single one-dimensional nanoparticle is sufficient toobtain a sensor medium but also several nanoparticles may be arranged ina more or less parallel arrangement. One-dimensional nanoparticles ofsmaller size than the gap size of the electrode pair may be arranged toform a network. The one-dimensional nanoparticles then formintersections at which the surface areas of neighboured nanoparticlesare in contact with each other thereby providing a conductive pathbetween the electrodes. The electrical transport through individualvanadium pentoxide nanowires has been described by J. Muster, G. T Kim,V. Krstic, J. G. Park, Y. W. Park, S. Roth and M. Burghard, Adv. Mater.,2000, 12, 420-424.

Surprisingly the sensitivity of the sensor device according to theinvention towards an analyte increases at higher relative humidity. Thesensors therefore preferably are combined with a humidity control or ahumidity measuring unit. In the first case, a controlled humidityensures a reproducible response of the sensors. In the second case, theanalyte concentration can be determined using, for example, acalibration data set and taking into account the measured humidity.

The above described chemical sensor device can easily be assembled.Therefore the invention further relates to a method for forming achemical sensor device as described above, comprising the followingsteps:

-   -   a) providing a substrate having a substrate surface;    -   b) providing one-dimensional nanoparticles essentially        consisting of a semiconducting A_(x)B_(y) compound, wherein A,        B, x and y are as defined above;    -   c) coating the substrate surface with the one-dimensional        nanoparticles thereby obtaining a sensor medium;    -   d) providing detection means for detecting a change of a        physical and/or chemical property of the sensor medium.

The one-dimensional nanoparticles can be prepared by known methods. Anoverview on methods for obtaining one-dimensional vanadium pentoxidematerials is e.g. given in J. Livage, Coordination Chemistry Reviews,1998, 178-180, 999-1018. The characteristics of the chemical sensoraccording to the invention can be influenced by the synthesisconditions. The addition of a surfactant during the preparation of theone-dimensional nanoparticles introduces a high porosity as has beenshown for vanadium alkoxide derived gels by S. Mege, M. Verelst, P.Lecante, E. Perez, F. Ansart and J. M. Savariault, Journal ofNon-Crystalline Solids, 1998,-238, 37-44. Porosity can be as high as 75%in presence of a surfactant, and oily 5% without surfactant. In the caseof devices with a relatively large number of fibres, it is of advantageto increase the porosity enhancing the diffusion rate of the analytemolecules in the sensor medium and therefore improving the response timeand sensitivity.

The one-dimensional nanoparticles can be deposited on the substrate byspin-coating, drop-coating, dip-coating, brush techniques, ink jetprinting technique or any other technique.

The one-dimensional nanoparticles can be aligned during deposition e.g.to bridge two chemiresistor electrodes. Alignment of one-dimensionalnanoparticles is preferred when using only few nanoparticles to form asensor medium, and allows a high reproducibility of the fabricationprocess. Alignment of the one-dimensional nanoparticles may be achievedby MIMIC (Micro Moulding in Capillaries) technique described by H. J.Muhr et al. loc. cit. or by applying a magnetic field. Orientation ofliquid-crystalline suspensions of vanadium pentoxide ribbons by amagnetic field is e.g. described by X. Commeinhes, P. Davidson, C.Bourgaux and J. Livage, Adv. Mat, 1997, 9, 900-903.

The sensor device has an increased sensitivity towards the detection ofamines at higher humidity levels. Further the sensor device shows littleinfluence of humidity on the response towards other analytes. To obtainresults with high reproducibility and/or to detect e.g. amines at verylow concentration levels preferably a humidity control device and/or ahumidity measuring unit is provided in close relationship to the sensormedium.

The above described chemical sensor device has a high sensitivity andhigh selectivity towards analytes as well as a fast response andrecovery time. A further subject of the invention therefore is a methodfor detecting an analyte in a sample, wherein a chemical sensor deviceas described above comprising a sensor medium and detection means isprovided, the sample is applied to the sensor medium and a change of aphysical and/or chemical property of the sensor medium is determined.

The above described chemical sensor devices are sensitive to differentgases and organic vapour. They also may be used for detecting an analytein a solution. A major advantage of the chemical sensor device accordingto the invention is its operation at or close to room temperature andits high sensitivity.

When using vanadium pentoxide nanofibres as a one-dimensionalnanoparticles the chemical sensor device is sensitive to gases, say CO,H₂, NH₃ but also to SO_(x), O₂ or NO_(x). The sensor is highly sensitiveto ammonia and polar organic molecules, like amines or thiols anddetection below 0,5 ppm is possible. By changing the dopant, it ispossible to create sensors with the same starting material, which coverthe whole range of concentration for a given gas. The sensitivitytowards amines allows an application of the sensor device according tothe invention e.g. in the food industry to monitor food processing.

The response of V₂O₅-based sensors to gases is generally fast. Theresponse time varies with the gas/vapour of interest as well as with thedopant. Even if the response can be slow, after 1 minute a large signalis already obtained, which is sufficient for electronic noseapplications.

The reversibility of the signal is good. In most cases, 90% of thesignal is recovered within 2-3 minutes when operated at roomtemperature.

With the sensor device according to the invention sensitivity increaseswith increasing relative humidity provided with the analyte in the caseof amines. The detection occurs at a wide range of humidities. Humidityabove 5% relative humidity is preferred and most preferably above 20% toensure a sufficient signal.

To obtain reproducible results from the sensor device relative humiditylevel of the analytes is preferably kept at a constant level during thedetermination of the change of a physical property of the sensor medium.

The different effects that humidity has got on the sensitivity todifferent analytes can be used for identification of an analyte. Theset-up consists in comparing the response to an analyte by humidifyingit and by drying it. For example, humidity has little effect on thesensitivity of V₂O₅ to propanol. So in such configuration, bothresponses should be similar. However, the response of V₂O₅ to an aminewill be much larger when the analyte is humidified then when a dryingagent is placed between the sample and the sensor. Therefore,differentiation between propanol and an amine with such set-up isstraightforward.

The sensor device according to the invention is very sensitive towards,the detection of amines. It could be demonstrated by the inventors thatit is possible to detect amines in low concentrations down to 30 ppb athigh humidity. Biogenic amines are often encountered in fermentedfoodstuff. For example, trimethylamine or ammonia is produced duringfish decomposition. Therefore volatile amines may be used as indicatorof fish freshness. Wine also contains volatile amines. Their influencecan be limited to spoiling the taste of the wine, but more seriously,can also endanger the health of the consumer. With the method accordingto the invention detection of those volatile amines is easy to perform.Further also detection of volatile amines in body fluids, e.g. sweat,urine, breath or blood is possible and therefore the method fordetecting an analyte, preferably an amine, according to the inventionmay be used for medical diagnosis. For example, di- and trimethylaminein the breath of a patient are indicative of uremic disease (kidneyfailure). Breast cancer can also be diagnosed by a specific pattern ofvolatile amines in urine. In addition, ammonia is often used in thechemical industry and the detection method according to the inventionmay be used to detect leaks.

Humidity has little effect on the response towards carbon monoxide,acetic acid and 1-propanol as could be demonstrated with vanadiumpentoxide sensors. There was little loss of sensitivity to otheranalytes than amines at high humidity compared to dry conditions. Thisis a major advantage when an array of sensors containing some vanadiumpentoxide sensors is used to analyse a complex smell.

The invention will now be described in more detail by way of examplesand with reference to the accompanying figures.

FIG. 1 shows schematically an assembled chemiresistor;

FIG. 2 schematically displays different types for the arrangement ofone-dimensional nanoparticles to bridge a gap between a pair ofelectrodes;

FIG. 3 schematically displays a set-up of a sensor device identificationof different analytes by varying humidity of an analyte gas;

FIG. 4 shows the response of different sensors to 100 ppm analytes NH₃,CO and H₂;

FIG. 5 shows a response of a silver doped vanadium pentoxide sensor to100 ppm CO at different doping levels of the sensor medium at roomtemperature;

FIG. 6 shows a response of a silver doped vanadium pentoxide sensor(sensor 7) to 360 ppb NH₃ at room temperature;

FIG. 7 shows the sensitivity isotherm of a silver doped vanadiumpentoxide sensor (sensor 7) to NH₃ at room temperature;

FIG. 8 shows the response of a vanadium pentoxide sensor doped with gold(sensor 2) to 1 ppm CO at room temperature;

FIG. 9 shows the response of another vanadium pentoxide sensor dopedwith gold (sensor 3) to 20 ppm H₃ at room temperature;

FIG. 10 shows the response of a silver-doped vanadium pentoxidechemoresistor to 30 ppb butylamine at 40% relative humidity;

FIG. 11 shows the response of a silver-doped vanadium pentoxidechemoresistor to fish samples (cod);

FIG. 12 shows the response of a silver-doped vanadium pentoxidechemoresistor to 237 ppm butylamine at different relative humidities.

FIG. 1 schematically shows a chemiresistor, which has a sensor mediumcomprising one-dimensional nanoparticles (nanobelts) as a sensitivematerial. On a substrate 1 are placed interdigitated electrodes 2. Theelectrode structures 2 are covered by a sensor film, which is formed ofone-dimensional nanoparticles 3. A constant current may be applied tothe leads of the electrodes 2 and a change in the voltage across theelectrodes may be detected by a detector (not shown).

FIG. 2 displays different arrangements of one-dimensional nanoparticles4 between a pair of electrodes 2. In FIG. 2 a a single one-dimensionalnanoparticle 4 is bridging the gap between the pair of electrodes 2. Forsimplicity only one one-dimensional nanoparticle is shown on the figure.Several particles can also be employed. In this arrangement, the analytecan modulate the conductivity along the one-dimensional nanoparticle byadsorption on its surface and/or by intercalation. The analyte can alsoinfluence the conductivity of the device by affecting the conductionpath between the particles 4 and the electrodes 2. The arrangement shownin FIG. 2 a is preferred for detecting analytes mainly interacting withthe particles changing the intrinsic conductivity of the one-dimensionalparticles. The one-dimensional nanoparticles can have a length muchsmaller than the gap size between a pair of electrodes. Theone-dimensional nanoparticles are then arranged in a random order toform a network of nanoparticles 4 between a pair of electrodes 2 asshown in FIG. 2 b. Like in the arrangement of FIG. 2 a the analyte canaffect the intrinsic conductivity of the particles as well as thecontact resistance between the particles and the electrodes. Inaddition, the analyte can change the interparticle contacts. In thisarrangement the analyte enhances or reduces the conduction between thenanoparticles. The arrangement shown in FIG. 2 b is preferred when theanalyte interacts with the interparticle contacts. Between individualone-dimensional nanoparticles 4 are formed voids, which provide an easyaccess of the analyte to the nanoparticle surface even when a sensormedium of a larger thickness is used.

FIG. 3 schematically displays a sensor device, which utilizes theinfluence of humidity on the sensitivity of the sensor towards differentanalytes. In a sample reservoir 5 an analyte is provided, comprisingvarious compounds, e.g. an amine and propanol. From the sample reservoir5 the analytes are transported by an carrier gas stream, e.g. a nitrogenstream, through a line 6 to a three-way valve 7. In a first step thethree-way valve 7 is open towards line 6 a, whereas line 6 b is shut.The gas stream containing the analytes is passing a humidity controldevice 8 by which a defined humidity is adjusted. The humidity of thegas stream is monitored by a humidity-monitoring unit 9. The humidifiedgas stream passes a further three-way valve 10 and is then introducedinto sensor chamber 11, where first signal is detected by sensor 12.Sensor 12 is connected to a computer (not displayed), that acts as adetecting device for storing and comparing the detected signals. Line 6b is shut by further three-way valve 10 and no gas is introduced intoline 6 b. In a second step three-way valves 7 and 10 are switched insuch a way that line 6 a is shut whereas line 6 b is opened. The gasstream containing the analytes is now introduced into a drying unit 13and dried for example by a drying agent. The dry gas stream is thenintroduced into sensor chamber 11 and a second signal is detected bysensor 12. In case humidity has little influence on the sensitivity ofthe sensor 12 towards propanol but has a large influence on thesensitivity of sensor 12 towards amines comparing first and secondsignal can differentiate those compounds. Whereas almost no differenceis obtained in case of propanol a clear difference in intensity betweenboth signals can be seen in case of an amine.

a) Preparation of Undoped Vanadium Pentoxide Nanobelts:

A wet-chemical method previously described by J. Muster et al. loc. cit.was used to prepare a stock of undoped V₂O₅ nanofibres. V₂O₅ sols wereprepared from 0,2 g ammonium(meta)vanadate (Aldrich) and 2 g acidic ionexchange resin (Dowex 50WX8-100, Aldrich) in 40 mL water. After a fewhours the formation of an orange sol is observed that darkens with time.V₂O₅ fibres with length of a few micrometers were observed after about 3days. The fibres employed for the experiments were several months old.

b) Preparation of Silver Doped Vanadium Pentoxide Nanobelts

Silver doped vanadium pentoxide nanofibres were prepared as describedunder (a) but during preparation of the V₂O₅ sols a silver salt (silvernitrate) is added to the solution.

The silver doped vanadium pentoxide nanofibres were used to preparesensor 7.

c) Fabrication of Sensors:

The one-dimensional nanoparticles were deposited onto BK7 glasssubstrates supporting lithographically made interdigitated electrodestructures. The electrode structures comprised a 5 nm titanium adhesionlayer on which a 95 nm gold layer was deposited. They comprised 50finger pairs having a width of 10 μm, a spacing of 10 μm, and an overlapof 1800 μm. The overall size of the electrode structures was 2 mm by 2mm. Before depositing the sensor film, the substrates were cleaned in anultrasonic bath with acetone, hexane, and isopropanol and by applying anoxygen plasma (4 min at 30 W and 0.24 mbar). The cleaned substrates wereimmersed into a solution of 0,1% DAS(N-[3-(trimethoxysilyl)propyl]-ethylenediamine, Aldrich) in water fortwo minutes followed by thorough rinsing with pure water and dryingunder a stream of air. This procedure functionalised the glasssubstrates with amino groups, which served as linking groups forsubsequent nanofibre deposition. Fibres obtained under (a) were dipcoated onto the substrate by dipping the substrate for 20 s in a dilutedsuspension of the fibres in H₂O. The substrates were rinsed with purewater and dried in a stream of air. Undoped V₂O₅-nanofibre sensors(sensor 8) ere obtained in this way.

d) Fabrication of a Silver-doped Sensor (Sensor 7)

The fabrication procedure described under (c) was repeated but asone-dimensional nanoparticles were used silver doped vanadium pentoxidenanofibres obtained under (b). Thereby a silver doped V₂O₅-nanofibresensor was obtained as sensor 7.

e) Doping of Sensors by Dipping

Sensors obtained under (c) were dipped into a solution of the dopant asdetailed in table 1. After dipping the sensors were thoroughly rinsedwith pure water and dried in a stream of air. TABLE 1 Sensors obtainedby dipping in a dopant solution Sensor Dopant [Dopant] Solvent Exposuretime 1 Silver acetate   1 mg in 1 ml H₂O 10 s 2 AuS(CH₃)₂ ⁺Cl⁻   1 mg in1 ml NMF 20 min 4 AuCl₃   1 mg in 1 ml NMF 30 min 5 Silver acetate 0.1mg in 1 ml H₂O 10 s 6 Silver acetate  10 mg in 1 ml H₂O 10 s

f) Doping of Sensor by Evaporation of a Gold Layer (Sensor 3)

Evaporation of a gold layer of 2 nm thickness on an undoped sensorobtained under (c). resulted in sensor 3. Atomic force microscopy showedthat approximately spherical particles were formed.

g) Sensitivity of Sensors to Different Gases

For gas test experiments, the sensors prepared as described under(c)-(f) were placed in a home made teflon chamber having a volume ofabout 1.23 cm³. The test gas was prepared by diluting a stock of ananalyte (10% analyte (H₂, CO, NH₃) in N₂) with an appropriate amount ofcarrier gas (dry N₂) using a mass flow system MK5 from MCZ UmwelttechnikGmbH, Ober-Mörlen, Germany to obtain the desired analyte concentration.The mass flow in the test chamber was adjusted to 400 mL/min and keptconstant for all experiments. All experiments were done at roomtemperature.

The resistance was monitored by applying a dc current using a SMU 236(Keithley) and recording the voltage using a multimeter 2002 (Keithley).The relative change in resistance was measured 120 s after exposing thesensors to the gas of interest. TABLE 2 Response ΔR/R_(int) of sensors1-4 to different gases 100 ppm NH₃ 100 ppm CO 100 ppm H₂ Sensor 1 +18%+1.2% +0.4% Sensor 2 −17%   −6% −0.7% Sensor 3  −9% −1.2% −0.8% Sensor 4+13% +1.6% +0.2%

The responses of sensors 1-3 are also graphically displayed in FIG. 3.Whereas sensors 1 and 2 have about the same sensitivity to ammonia (inabsolute value), sensor 2 has a sensitivity towards CO which is about 5times larger than for sensor 1. By combining these two sensors it istherefore possible to distinguish NH₃ and CO. Sensor 3 is less sensitiveto ammonia than sensors 1 and 2, but is more sensitive to H₂. This makesthis sensor more suitable for applications where detection of hydrogenis required.

h) Influence of Doping Level

Silver doped vanadium pentoxide sensors 1, 5 and 6 having low (sensor5), medium (sensor 1) and high (sensor 6) doping level were exposed to100 ppm CO. The response of the sensors is displayed in FIG. 5. Whereassensor 5 displayed a fast response and a change in relative resistivityΔR/R_(ini) of −1.3% sensors 1 and 6 having medium and high doping leveldisplayed a change in relative resistivity ΔR/R_(ini) of +1.0% and +1.3,respectively. This demonstrates that the response of the sensor can bemodified by varying the doping level.

i) Sensitivity of Silver Doped Vanadium Pentoxide Sensors toward NH₃

Sensor 7 was exposed to 360 ppb ammonia. The response of the sensor isdisplayed in FIG. 6. The sensor displayed a fast response ofΔR/R_(ini)−1.6% within 120 seconds. This demonstrates that the sensor issensitive to very low concentrations of ammonia giving a fast responseand a short recovery period. At higher ammonia concentrations anincreased response of the sensor is obtained as is obvious from thesensitivity isotherm displayed in FIG. 7.

k) Sensitivity Towards Carbon Monoxide

Gold doped sensor 2 was exposed to 1 ppm CO at room temperature. Theresponse of the sensor is displayed in FIG. 8. Even at low concentrationa response ΔR/R_(ini) of −1.7% was obtained within 120 seconds.

l) Sensitivity Towards Hydrogen Gas

Gold doped sensor 3 was exposed to 20 ppm H₂ at room temperature. Theresponse of the sensor is displayed in FIG. 9. Within 120 s a responseΔR/R_(ini) of −0.4 was obtained.

The vanadium pentoxide based sensors can be used as single sensor forNH₃, CO and H₂. Due to the cross-sensitivity to different gases and tothe different selectivities of the different sensors, an array ofV₂O₅-based sensors with different dopants can be used as an array ofsensors for electronic noses.

m) Sensitivity Towards Butylamine at High Humidity

Silver doped sensor 7 was exposed to 30 ppb butylamine at 40% relativehumidity. The response of the sensor is displayed in FIG. 10. The arrowup shows when the butylamine is applied and the arrow down shows whenthe butylamine is removed from the gas phase. Within 500 s a responseΔR/R_(ini) of 1.9% was obtained.

n) Detection of Biogenic Amines

Two fresh fish samples (cod) where prepared and stored in glasscontainers each. The gas of the head space was sampled by using amicropump and analyzed by exposing it to silver doped sensor 7 for 10seconds each. First sample 1 was analyzed followed by sample 2. Thedotted line displayed in FIG. 11 is the trace recorded at one day whenthe samples were fresh. Both samples gave similar signals. Sample 1 wasthen stored in a fridge for 24 hours whereas sample 2 was stored atambient conditions. Both samples were again analyzed the next day. Theplain line displayed in FIG. 11 corresponds to the trace recorded afterstorage of the samples. The signal of sample 2, stored under ambientconditions, gives a larger response than the signal of sample 1 storedin the fridge. It is known that most sea fishes produce amines duringdecomposition. We assign the increase in signal of sample 2 to a fasterdecomposition of the fish due to the elevated storing temperature, andtherefore a higher level of amine.

o) Influence of Humidity on Sensor Sensitivity

Silver doped sensor 7 was exposed to 237 ppm butylamine at differenthumidities. The sensor response was measured at 5, 20, 30, 40, 50 and60% relative humidity. The response of the sensor is displayed in FIG.12. The arrow indicates the increasing humidity. The highest level ofsensitivity was obtained at 60% relative humidity.

1. Chemical sensor device, comprising a substrate, a sensor mediumformed on the substrate, the sensor medium comprising one-dimensionalnanoparticles, wherein the 5 one-dimensional nanoparticles essentiallyconsist of a semiconducting A_(x)B_(y) compound, wherein thesemiconducting A_(x)B_(y) compound is selected from the group,consisting of II-VI-semiconductors, III-V-semiconductors, semiconductingmetal oxides, semiconducting metal sulfides, semiconducting metalphosphides, metal nitrides, semiconducting metal selenides andsemiconducting metal tellurides; and detection means for detecting achange of a physical and/or chemical property of the sensor medium. 2.Chemical sensor device according to claim 1, wherein the semiconductingA_(x)B_(y) compound comprises at least one element A present indifferent oxidation states.
 3. Chemical sensor device according to claim1, wherein A is at least one element selected from the group consistingof V, Fe, In, Sb, Pb, Mn, Cd, Mo, W, Cr, Ag, Ru and Re.
 4. Chemicalsensor device according to claim 1, wherein B is at least one elementselected from the group consisting of O, S and Se.
 5. Chemical sensordevice according to claim 1, the semiconducting A_(x)B_(y) compound is avanadium oxide.
 6. Chemical sensor device according to claim 1, whereinx>0 and y≧0.
 7. Chemical sensor device according to claim 1, wherein theone-dimensional nanoparticles are filled.
 8. Chemical sensor deviceaccording to claim 1, wherein the one-dimensional nanoparticles have arectangular cross section.
 9. Chemical sensor device according to claim1, wherein the one-dimensional nanoparticles are provided in the form ofa bundle.
 10. Chemical sensor device according to claim 1, wherein theone-dimensional nanoparticle further comprises a dopant.
 11. Chemicalsensor device according to claim 10, wherein the dopant is an organiccompound.
 12. Chemical sensor device according to claim 11, wherein theorganic compound is selected from the group consisting of thiols,carboxylic acids, amines, phosphines, phosphine oxides, pyridine andpyridine derivatives, thiophene and thiophene derivatives, pyrrole andpyrrole derivatives.
 13. Chemical sensor device according to claim 10,wherein the dopant is an ion or an ion complex.
 14. Chemical sensordevice according to claim 10, wherein the dopant is intercalated withinthe one-dimensional nanoparticle and/or is adsorbed on the surface ofthe one-dimensional nanoparticle.
 15. Chemical sensor device accordingto claim 1, wherein the sensor medium additionally comprises secondnanoparticles different from the one-dimensional nanoparticles. 16.Chemical sensor according to claim 15, wherein the second nanoparticleshave an approximately spherical shape.
 17. Chemical sensor deviceaccording to claim 15, wherein the second nanoparticle essentiallyconsists of a metal.
 18. Chemical sensor device according to claim 1,wherein the sensor device is arranged as a chemiresistor, a chemicalsensitive diode, a multiterminal device, a chemical sensitivetransistor, a mass sensitive device, or an optical device.
 19. Chemicalsensor device according to claim 1, wherein a heater is provided inclose relationship to the sensor medium.
 20. Chemical sensor deviceaccording to claim 1, wherein the sensor material comprises at least 1individual of said one-dimensional nanoparticles bridging a gap betweentwo electrodes provided on the substrate.
 21. Chemical sensor deviceaccording to claim 1, wherein a humidity control device is provided inclose relationship to the sensor.
 22. Chemical sensor device accordingto claim 1, wherein a humidity monitoring unit is provided in closerelationship to the sensor medium.
 23. Method for forming a chemicalsensor device according to claim 1, comprising the following steps: a)providing a substrate having a substrate surface; b) providingone-dimensional nanoparticles essentially consisting of a semiconductingA_(x)B_(y) compound as defined in claim 1; c) coating the substratesurface with the one-dimensional nanoparticles thereby obtaining asensor medium; d) providing detection means for detecting a change of aphysical property of the sensor medium.
 24. Method according to claim23, wherein the one-dimensional nanoparticles are aligned on thesubstrate surface.
 25. Method according to claim 23, wherein theone-dimensional nanoparticles are fixed to the substrate surface by abifunctional ligand which is linked to the substrate surface by a firstfunctional group and to the one-dimensional nanoparticle surface by asecond functional group.
 26. Method according to claim 23, wherein ahumidity control device and/or a humidity measuring unit is provided inclose relationship to the sensor medium.
 27. Method for detecting ananalyte in a sample, wherein a chemical sensor device according to claim1 comprising a sensor medium and detection means is provided, an analyteis applied to the sensor medium and a change of a physical property ofthe sensor medium is determined by the detection means.
 28. Methodaccording to claim 27, wherein the analyte is provided in a gaseousphase.
 29. Method according to claim 27, wherein the analyte is anamine.
 30. Method according to claim 27, wherein the change of aphysical property of the sensor medium is determined at a temperaturebelow 100° C., preferably below 50° C., especially preferred at roomtemperature.
 31. Method according to claim 27, wherein the change of aphysical property of the sensor medium is determined at a relativehumidity in an atmosphere above the sensor medium of more than 5%. 32.Method according to claim 31, wherein the relative humidity is kept at aconstant value during determination of the change of a physical propertyof the sensor medium.
 33. Method according to claim 27, wherein thesensor medium is saturated with water vapour.
 34. Method according toclaim 27, wherein a first run is performed, in which a first level ofrelative humidity is adjusted in the analyte and then the analyte isapplied to the sensor medium to obtain a first value of a change of aphysical property of the sensor medium, and a second run is performed,in which a second level of humidity is adjusted in the analyte and theanalyte is then applied to the sensor medium to obtain a second value ofa change of a physical property of the sensor medium, and first andsecond value are compared to identify the analyte.
 35. Method accordingto claim 34, wherein a difference in relative humidity between first andsecond level is at least 10% relative humidity.